研究目的
Investigating the method to realize single-transverse-mode and single-polarization vertical-cavity surface-emitting lasers (VCSELs) with an eye-shaped oxide aperture through enhanced anisotropic oxidation of the oxide layer.
研究成果
The study successfully demonstrated single-transverse-mode and single-polarization VCSELs with eye-shaped oxide apertures. The method of enhanced anisotropic oxidation offers a feasible and effective approach to control the polarization and mode characteristics of VCSELs, with potential applications in photonic devices.
研究不足
The study is limited by the specific conditions required for anisotropic oxidation and the dimensions of the oxide aperture that can be achieved. The method's applicability to large-scale fabrication and other material systems remains to be explored.
1：Experimental Design and Method Selection:
The study involved the design of VCSELs with eye-shaped oxide apertures achieved through enhanced anisotropic oxidation of the AlAs layer. The methodology included controlling the oxidation conditions to achieve anisotropy in the oxidation rate along different crystal directions.
2：Sample Selection and Data Sources:
VCSEL samples with different oxidation times were fabricated to study the effect of oxide aperture dimensions on polarization and mode control.
3：List of Experimental Equipment and Materials:
The study used MOVPE-grown 890 nm VCSEL wafers, AlAs oxide layers, and inductively coupled plasma (ICP) for mesa definition.
4：Experimental Procedures and Operational Workflow:
The process included defining circular mesas, oxidizing the AlAs layer under controlled conditions, and measuring the polarization and mode characteristics of the fabricated VCSELs.
5：Data Analysis Methods:
The analysis involved measuring the orthogonal polarization suppression ratio (OPSR) and single-mode suppression ratio (SMSR) to evaluate the performance of the VCSELs.
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