研究目的
Investigating the wavelength stabilization against temperature variation of high-power broad area 1.5-μm InGaAsP/InP laser diodes by employing surface gratings for application in eye-safe automotive LIDAR systems.
研究成果
The study successfully demonstrated high-power broad-area 1.5 μm InGaAsP DBR laser diodes with effective wavelength stabilization, enabling the implementation of systems with low noise receivers by employing narrow pass-band ?lters. The DBR locks the lasing to the grating even with significant detuning, facilitating the fabrication of large batches of LDs with identical emission characteristics and high yield.
研究不足
The study focuses on pulsed operation and specific wavelength stabilization techniques, which may not cover all operational conditions or alternative stabilization methods.
1：Experimental Design and Method Selection:
The study employed surface gratings monolithically integrated on the laser chip using nanoimprint lithography for wavelength stabilization.
2：Sample Selection and Data Sources:
The semiconductor structure comprised three InGaAsP quantum wells surrounded by InGaAsP optical con?nement layers and InP claddings, grown on n-InP(100) with metalorganic vapor phase epitaxy (MOVPE).
3：List of Experimental Equipment and Materials:
Equipment included EVG620 mask aligner, Thorlabs DET08CL/M 5 GHz InGaAs photodetector, Agilent DSO9254A
4：5 GHz oscilloscope, Yokogawa AQ6375 optical spectrum analyzer, and Antritsu MS9710C optical spectrum analyzer. Materials included mr-UVCur06 photoresist, SiN layer, and various metallization materials. Experimental Procedures and Operational Workflow:
The DBR gratings were fabricated using soft-stamp nanoimprint lithography, followed by etching processes and metallization. The components were characterized in pulsed operation with specific current pulses.
5：Data Analysis Methods:
The peak power and spectral properties were measured and analyzed to evaluate the wavelength stabilization effect.
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Antritsu MS9710C optical spectrum analyzer
MS9710C
Antritsu
Used for measuring the spectra of the DBR-LDs up to 15 A with 1 μs pulses.
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Thorlabs DET08CL/M 5 GHz InGaAs photodetector
DET08CL/M
Thorlabs
Used for measuring the peak power of the laser diodes.
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Agilent DSO9254A 2.5 GHz oscilloscope
DSO9254A
Agilent
Used in conjunction with the photodetector for recording the peak power measurements.
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Yokogawa AQ6375 optical spectrum analyzer
AQ6375
Yokogawa
Used for measuring the spectra of the DBR-LDs up to 40 A injection current with 160 ns pulses.
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EVG620 mask aligner
EVG620
EV Group
Used for soft-stamp nanoimprint lithography in the fabrication of DBR gratings.
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mr-UVCur06 photoresist
mr-UVCur06
Micro resist technology GmbH
Used in the nanoimprint lithography process for patterning the DBR gratings.
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