研究目的
Investigating the potential of 3D laser lithography (3DLL) for the fabrication of microoptical elements without stitching defects, enabling the production of larger and more complex structures with optical grade surface finish.
研究成果
The research demonstrates the effectiveness of synchronizing linear stages and galvo-scanners in 3DLL for producing stitch-free, functional microoptical elements up to several mm in size. This approach offers a straightforward and relatively simple method for fabricating high-quality microoptics, with potential applications in various fields requiring precise light control at the micro-scale.
研究不足
The study acknowledges challenges in working at the mm size scale, including potential deformations during the development process, as indicated by slightly elliptical focal spots in some lenses.
1：Experimental Design and Method Selection:
The study employs 3D laser lithography (3DLL) for fabricating microoptical elements, focusing on synchronizing linear stages and galvo-scanners to achieve stitch-free printing.
2：Sample Selection and Data Sources:
Microoptical elements such as refractive microlenses, Fresnel lenses, microprisms, and opaque apertures are fabricated and analyzed.
3：List of Experimental Equipment and Materials:
The setup includes a femtosecond laser for 3D lithography, galvo-scanners for beam positioning, and linear stages for larger area coverage.
4：Experimental Procedures and Operational Workflow:
The process involves the synchronization of linear stages and galvo-scanners to print microoptical elements in a single step, avoiding stitching defects.
5：Data Analysis Methods:
The quality and functionality of the fabricated elements are assessed through qualitative and quantitative analysis, including SEM imaging and CCD imaging of focal spots.
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