研究目的
To simulate and predict the rounding of micro-pyramids during the ozone-based wet-chemical cleaning process in the PV-industry.
研究成果
The developed simulation model accurately predicts the etch rate and rounding radius of micro-pyramids during ozone-based wet-chemical cleaning, showing good agreement with experimental results. This model can be used to optimize cleaning processes in the PV-industry without the need for expensive and time-consuming experiments.
研究不足
The model parameters k and D were adapted based on experimental results and not taken from literature, which may limit the generalizability of the model. Additionally, the model is currently 2D and needs to be extended to 3D for more comprehensive predictions.
1：Experimental Design and Method Selection:
A two-dimensional process simulation model was built using the finite element method of COMSOL Multiphysics to describe the diffusion and convection based mass transport of ozone along the pyramids.
2：Sample Selection and Data Sources:
Experimental data on etch rate and roundness (R) of micro-pyramids tips were used for model adjustment.
3：List of Experimental Equipment and Materials:
COMSOL Multiphysics software, ozone-based cleaning solution.
4：Experimental Procedures and Operational Workflow:
A parametric study was carried out to adjust the model parameters (etch rate constant k and diffusion coefficient D) based on experimental results.
5：Data Analysis Methods:
The simulation results were compared with experimental data to validate the model.
独家科研数据包，助您复现前沿成果，加速创新突破
获取完整内容
