研究目的
Investigating the fabrication and actuation of an electrostatic actuator made by 2-photon polymerization (2PP) integrated in a closed microcavity for MEMS applications.
研究成果
The study successfully demonstrates a method to actuate 2PP structures electrostatically and integrate them in a closed microcavity. The fabrication process, including metallization and low-temperature bonding, is effective for creating MEMS devices with potential for various applications.
研究不足
The polymer formed by 2PP of IP-S resin has a low temperature stability of about 220°C, ruling out common bonding techniques such as anodic bonding. The process is only suitable for low-rise structures due to inhomogeneous resist thickness and large mask-to-wafer distance during exposure.
1：Experimental Design and Method Selection:
The study employs a novel wafer-scale fabrication process involving 2-photon polymerization (2PP) for creating 3D structures, metallization via physical vapor deposition (PVD), and low-temperature wafer-to-wafer bonding using Parylene-C.
2：Sample Selection and Data Sources:
Borosilicate glass and silicon wafers are used as substrates. The 3D structures are designed as microfluidic valves.
3：List of Experimental Equipment and Materials:
Photonic Professional GT from Nanoscribe GmbH for DLW, IP-S resin, chromium and gold for metallization, Parylene-C for insulation and bonding.
4：Experimental Procedures and Operational Workflow:
The process includes patterning metallization by a lift-off process, DLW of 3D structures, metallization, and bonding of wafers at 205°C.
5：Data Analysis Methods:
The actuation of the platform is observed under a microscope at different voltages.
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