研究目的
Investigating the monitoring of evolving laser induced periodic surface structures (LIPSS) on titanium and silicon nitride surfaces using an optical imaging system to observe the backscattered light during the patterning process.
研究成果
The study demonstrated that the generation of LIPSS on titanium and silicon nitride surfaces gives rise to a characteristic fringe pattern in the backscattered light of the patterning laser, which can be used as a simple and fast monitoring method for LIPSS formation during the manufacturing process.
研究不足
The study did not unambiguously resolve the role of carrier density in the generation of the fringe pattern. The similarity of fringe patterns for very different LIPSS periods in Si3N4 and titanium was surprising and not fully explained.
1：Experimental Design and Method Selection:
The study involves generating LIPSS on titanium and silicon nitride surfaces using multiple femtosecond laser pulses and observing the backscattered light with an optical imaging system.
2：Sample Selection and Data Sources:
Titanium and silicon nitride foils were used as samples.
3：List of Experimental Equipment and Materials:
A Max-Born-Institute High Field Ti:Sapphire laser, off-axis parabolic mirror (OAP), dielectric mirror (M2), CCD camera (PIXIS), scanning electron microscopy (SEM), and atomic force microscopy (AFM) were used.
4：Experimental Procedures and Operational Workflow:
The laser pulses were focused onto the target, and backscattered light was collected and collimated by the OAP, then refocused onto a CCD camera.
5：Data Analysis Methods:
The data was analyzed using finite difference time domain (FDTD) numerical simulations to understand the origin of the observed fringe pattern.
独家科研数据包，助您复现前沿成果，加速创新突破
获取完整内容
