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[IEEE 2018 14th IEEE International Conference on Solid-State and Integrated Circuit Technology (ICSICT) - Qingdao (2018.10.31-2018.11.3)] 2018 14th IEEE International Conference on Solid-State and Integrated Circuit Technology (ICSICT) - Orientation controlled GaSb nanowires: from growth to application

DOI:10.1109/ICSICT.2018.8565764 出版年份:2018 更新时间:2025-09-11 14:15:04
摘要: In recent years, high-mobility GaSb nanowires have received tremendous attention for high-performance p-type transistors; however, due to the difficulty in achieving thin, uniform and orientation-controlled nanowires (NWs), there is limited report until now addressing their orientation-dependent properties in this important one-dimensional material system, where all these are essential information for the deployment of applications. Using various GaSb NWs CMOS-compatible Pd catalysts, we demonstrated the formation of high-mobility (cid:1766)111(cid:1767)-oriented GaSb nanowires (NWs) via vapor-solid-solid (VSS) growth by the newly developed surfactant-assisted chemical vapor deposition through a complementary experimental and theoretical approach. In contrast to NWs formed by the conventional vapor-liquid-solid (VLS) mechanism, cylindrical-shaped Pd5Ga4 catalytic seeds were present in solid catalysts, our Pd-catalyzed VSS-NWs. As stoichiometric Pd5Ga4 was found to have the lowest crystal surface energy and thus giving rise to a minimal surface diffusion as well as an optimal in-plane interface interface for efficient orientation at epitaxial NW nucleation. Over 95% high crystalline quality NWs were grown in (cid:1766)111(cid:1767) orientation for a wide diameter range of between 10 and 70 nm. Back-gated the field-effect Pd-catalyzed GaSb NWs exhibit a superior peak hole mobility of ~330 cm2 V-1 s-1, close to the mobility limit for a NW channel diameter of ~30 nm with a free carrier concentration of ~1018 cm-3. This suggests that the NWs have excellent homogeneity in phase purity, growth orientation, electrical characteristics. Contact printing process was also used to fabricate large-scale assembly of Pd-catalyzed GaSb NW parallel arrays, confirming the potential constructions and applications of these high-performance electronic devices.
作者: Zaixing Yang,Johnny C. Ho
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Investigating the formation of high-mobility, phase-pure (cid:1766)111(cid:1767)-oriented GaSb nanowires (NWs) using CMOS-compatible Pd catalysts via vapor-solid-solid (VSS) growth for high-performance p-type transistors.

The study successfully demonstrated the VSS growth of high-performance, CMOS-compatible, and phase-pure (cid:1766)111(cid:1767)-oriented GaSb NWs using Pd catalysts. These NWs exhibited superior hole mobility and uniformity, making them promising materials for high-performance electronic devices. The contact printing process further illustrated their potential for large-scale applications.

The study focuses on the growth and characterization of GaSb NWs with specific orientations and diameters. The scalability of the contact printing process for large-scale device fabrication and the integration of these NWs into complex circuits are areas for further optimization.

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