研究目的
Investigating the synthesis of large-area, continuous multilayer ReS2 film directly on a SiO2 substrate for high-speed photodetectors.
研究成果
The study successfully synthesized a large-area, continuous multilayer ReS2 film directly on a SiO2 substrate, demonstrating high photoresponse speeds and responsivity. This method is amenable to large-scale integration, paving the way for practical optoelectronic applications based on 2D layered materials.
研究不足
The study acknowledges that PTAS can be a source of scattering sites in the film, which may affect film quality. The density of nucleation promoters was controlled to minimize its effect.
1:Experimental Design and Method Selection:
The study utilized chemical vapor deposition (CVD) with perylene-3,4,9,10-tetracarboxylic acid tetrapotassium acid salt (PTAS) as the seeding promoter to synthesize large-area ReS2 film.
2:Sample Selection and Data Sources:
SiO2 (300 nm)/Si substrate was used, cleaned and pre-treated with PTAS.
3:List of Experimental Equipment and Materials:
CVD furnace, FE-TEM, HR-Raman, AFM, spectrofluorometer, XPS, probe station, semiconductor parameter analyzer, tunable light source, laser power meter.
4:Experimental Procedures and Operational Workflow:
The substrate was cleaned, PTAS was applied, and the CVD process was conducted with specific temperature and argon gas flow settings.
5:Data Analysis Methods:
Raman spectroscopy, photoluminescence spectroscopy, XPS, AFM, and FE-TEM were used for material characterization. Photodetector performance was measured using a probe station and semiconductor parameter analyzer.
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FE-TEM
JEMF200
Analysis of the sample structure
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HR-Raman
inVia Raman microscopes
Raman spectroscopy analysis
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AFM
XE150
Atomic force microscopy analysis
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Spectrofluorometer
QM-4/2005SE
Photoluminescence spectroscopy analysis
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XPS
K-Alpha
X-ray photoelectron spectroscopy analysis
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Semiconductor parameter analyzer
Keithley 4200
Measurement of I–V performance
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Tunable light source
TLS-300X
Newport Corp.
Providing illumination source
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Laser power meter
Laser Power Meter LP1
Sanwa Corp.
Measurement of optical powers
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