研究目的
To demonstrate a single fiber femtosecond laser as a versatile light source capable of driving multiple LCSI interferometers simultaneously for 3-D surface profile measurements at multiple sites concurrently.
研究成果
The integrated scheme of 3-D surface profile measurements at multiple sites concurrently by employing a single fiber femtosecond laser has been proved feasible. This versatile use of an ultrashort mode-locked laser has been realized by linear scanning control of the pulse repetition rate on the source site with synchronization to the GPS clock, while diverse forms of unequal-path, non-symmetric, frequency up-converting measurements are taken with nano-precision from different targets simply by delivering fr-scanned femtosecond pulses through a fiber network.
研究不足
The industrial use of ultrashort lasers is restricted mainly by hardware cost and complexity.
1：Experimental Design and Method Selection:
The methodology involves using a single fiber femtosecond laser as the common light source for low coherence scanning interferometry (LCSI), with linear scanning control of the pulse repetition rate (fr) on the source site.
2：Sample Selection and Data Sources:
The experiment involves measuring the surface profile of a Si wafer and a gauge block assembly.
3：List of Experimental Equipment and Materials:
Equipment includes an Er-doped fiber femtosecond laser, an Er-doped fiber amplifier (EDFA), single-mode fibers (SMF), dispersion compensation fibers (DCF), polarization controllers (PC), and CCD cameras.
4：Experimental Procedures and Operational Workflow:
The pulse repetition rate fr is varied in a scanning mode, and the output pulses are amplified and delivered over to two interferometers in parallel.
5：Data Analysis Methods:
The 3-D profiles are reconstructed by adopting the centroid algorithm of low coherence scanning interferometry.
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Er-doped fiber femtosecond laser
C-fiber
Menlosystems
Generates a pulse train for low coherence scanning interferometry
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Single-mode fiber
SMF-28
Corning
Used in the measurement and reference arms of the interferometer
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High order mode fiber module
FemtoComp800
OFS
Used for dispersion compensation at 780 nm
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Single-mode fiber
Clearlite780-11
OFS
Used in combination with the high order mode fiber module
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Er-doped fiber amplifier
EDFA
Amplifies the output pulses
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Dispersion compensating fiber
DM1010-D
YOFC
Compensates for pulse dispersion in the interferometer
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