研究目的
Designing and experimentally demonstrating a compact broadband polarization beam splitter using a silicon-nitride-assisted three-waveguide coupler to solve the polarization sensitive problem in photonic integration circuits.
研究成果
A compact broadband polarization beam splitter using the Si3N4 assisted three-waveguide coupler has been realized, achieving high extinction ratios and low insertion losses. The device can be applied to photonic integration circuits.
研究不足
The fabrication errors of the waveguide, including the waveguide width errors and the roughness of the waveguide surfaces, the deposition of Si3N4 is miss-alignment and non-uniform, and the measured errors resulted from the alignment between the fiber and the coupling grating.
1：Experimental Design and Method Selection:
The polarization beam splitter is designed based on a silicon-nitride-assisted three-waveguide coupler to achieve phase matching for the TM mode but not for the TE mode.
2：Sample Selection and Data Sources:
The device is fabricated on an SOI substrate with a Si waveguide thickness of 220 nm.
3：List of Experimental Equipment and Materials:
Includes SOI substrates, ZEP520A resist, E-beam lithography (EBL), inductively coupled plasma (ICP) dry etching, Si3N4 layer deposition by ICPCVD, and SiO2 cladding deposition by PECVD.
4：Experimental Procedures and Operational Workflow:
The fabrication process involves clearing SOI substrates, spin coating with resist, EBL for patterning, ICP dry etching, Si3N4 deposition, and SiO2 cladding deposition.
5：Data Analysis Methods:
The transmission spectrum powers are measured by an optical spectrum analyzer (OSA).
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