摘要： The impact of some external input parameters on electron, ozone O3, negative O? and positive O2+ ions, metastable singlet delta-state O2(a1Δg) molecule and atomic oxygen O formation is investigated using a numerical simulation. A one-dimensional, self-consistent fluid model of a dual radio-frequency capacitively coupled discharge operating on pure oxygen is developed to explore the evolution of the species density profiles as functions of gas pressure pg, driving high-frequency fhf, inter-electrode gap distance d and driving voltage waveform Vhf. The proposed model incorporates five main species and 24 dominant reaction channels. Simulation results show that the time-averaged density profiles of electron, ozone O3, negative O? and positive O2+ ions decrease when the gas pressure increases. However, the density of the metastable singlet delta-state O2(a1Δg) molecule and atomic oxygen O increase when the gas pressure increases. The electron density significantly increases with increased fhf until a maximum peak is reached at 40.68 MHz, and then it drops almost linearly at frequencies greater than 40.68 MHz. However, the negative ions O? density increases over a range of frequencies from 27.12 to 67.80 MHz, then it decreases slightly as fhf increases further. Therefore, when fhf increases, it does enhance the production of the metastable O2(a1Δg) and the oxygen O atoms, whereas the O2+ density is decreased. It is also shown that an increase in the inter-electrode gap distance causes a noticeably decrease in the formation of the various species in the discharge. Furthermore, a significant increase in the atomic oxygen O and the metastable singlet delta-state O2(a1Δg) densities is displayed as Vhf increases. Comparisons are made with recent simulation models and experimental data, and a qualitative agreement is obtained.