研究目的

Reviewing the calibration of displacement laser interferometer systems used for the calibration of machine tools and CMMs, focusing on several approaches including calibrations of separate components or the system as a whole.

研究成果

For displacement laser interferometer systems, many good practices have been established and many accredited laboratories deliver adequate services. Nevertheless, well-argued choices can be made regarding the necessity and feasibility of some calibrations. Users can carry out some of the tests themselves, such as the noise and the software checks on environmental conditions, and based on general knowledge and experiences over some decades some calibrations, e.g., the counting system, the optics and maybe even the laser frequency may be carried out just once or at long intervals.

研究不足

The paper discusses the technical and application constraints of the experiments, including the necessity and feasibility of some calibrations, and potential areas for optimization such as the periodic re-calibration of environmental sensors.