研究目的
To demonstrate a simple direct maskless laser-based approach for fabrication of back-reflector-coupled plasmonic nanorings arrays and their application in sensing.
研究成果
The proposed method offers freedom in the choice of materials to design composite MIM structure and provides more freedom from the point of view of chemical performance of the MIM sensor. The simple, reproducible and easily scalable procedure proposed in this study will find further applications in the future as a very efficient approach to produce a wide number of devices for nanophotonic applications.
研究不足
The minimal size of the produced nanorings is limited by the focal-plane size of the donut-shaped beam. The range of available diameters D of the MIM nanorings lay between 900 and 1200 nm.
1：Experimental Design and Method Selection:
The approach is based on delicate ablation of an upper metal film of a metal-insulator-metal (MIM) sandwich with donut-shaped laser pulses followed by argon ion-beam polishing.
2：Sample Selection and Data Sources:
A MIM sandwich was fabricated via consequent deposition of 300-nm thick Ag, 30-nm thick SiO2 and 100-nm thick Ag films onto commercial Si wafer.
3：List of Experimental Equipment and Materials:
High-vacuum e-beam evaporation, second-harmonic (515 nm) 200-fs laser pulses, commercial polarization converter, dry microscope objective, Ar ion beam, high-resolution scanning electron microscopy, atomic-force microscopy, 3D FDTD solver.
4：Experimental Procedures and Operational Workflow:
The upper 100-nm thick Ag film was irradiated with shaped fs laser pulses, then treated with Ar ion beam. The morphology was analyzed using SEM and AFM.
5：Data Analysis Methods:
Numerical simulations of the MIM performance were carried out using a commercial 3D FDTD solver.
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