研究目的
To compare sensitive volumes associated with ion- and laser-induced charge collection in an epitaxial silicon diode and to understand the differences in the amount of potential modulation between the two methods.
研究成果
The single laser-based sensitive volume describes the collected charge results from the laser experiments at multiple pulse energies and focal positions, whereas the laser-based sensitive volume agrees with ion experimental results only at biases when the device is fully depleted. When the device is not fully depleted, differences in potential modulation between the ion- and laser-induced charge cause the respective sensitive volumes to differ.
研究不足
Differences in the amount of potential modulation explain the differences between the ion- and laser-based sensitive volumes at the lower bias. Truncation of potential modulation by the highly doped substrate at the higher bias results in similar sensitive volumes.
1：Experimental Design and Method Selection:
The study used a large area Si diode fabricated on an epi-layer for comparing sensitive volumes defined by measurements of ion- and TPA pulsed laser-induced collected charge.
2：Sample Selection and Data Sources:
An epitaxial Si diode manufactured by Beijing Microelectronics Technology Institute (BMTI) was used as a test structure.
3：List of Experimental Equipment and Materials:
Pulsed laser testing was performed at the Naval Research Laboratory (NRL) Ultrafast Laser Facility using two-photon absorption (TPA) at a wavelength of 1260 nm. Ion testing was performed at Lawrence Berkeley National Lab’s (LBNL) 88” Cyclotron.
4：Experimental Procedures and Operational Workflow:
A series of measurements made by changing the depth of the laser focus within a device, called a depth scan, was performed. Three-dimensional optical simulations of the laser-induced charge generation profiles were performed using Lumerical.
5：Data Analysis Methods:
The collected charge for each of the other experimental focal positions was predicted by integrating their Lumerical charge distributions over the sensitive volumes found.
独家科研数据包，助您复现前沿成果，加速创新突破
获取完整内容
