摘要： Theoretical studies of ultra-thin silicon solar cells with cylindrical, conical and parabolic surface nanostructures inherited from natural self-assembled anodic alumina oxide (NSA-AAO) were performed by finite-difference time-domain (FDTD) method. All nanostructured solar cells obtained an optimized efficiency enhancement as high as more than 33% comparing with that of the anti-reflective (AR) one. Numerical results reveal that the range of efficient structural parameters for the nanostructured (e.g. cylindrical) solar cell can be effectively enlarged as the period of the nanostructure changes from 0.1 μm to 0.5 μm. Moreover, the improvements of absorption photocurrent density (Jph) in conical and parabolic nanostructured solar cells are comparable with the cylindrical nanostructured one but less sensitive to the fill factor and structural height in the whole simulation region of 0.1-0.9 and 0-0.25 μm, respectively. Equivalent refractive index models were used to analysis the antireflection performance of surface nanostructures from the point of view of sidewall profiles. Resonance modes induced through nanostructures have greatly improved the absorptance of solar cells in broadening wavelength bands which consequently raised the Jph. This study serves as a way for the practical design and application of AAO nanostructure based high-efficiency ultra-thin solar cells.