研究目的
Investigating the fabrication and optical performance of a proton-implanted planar waveguide in terbium gallium garnet (TGG) crystal, including the effects of annealing treatments.
研究成果
The fabricated TGG waveguide annealed at 410?C showed improved optical performance, with more guided modes and better light confinement. The study demonstrates the potential of proton implantation and annealing in optimizing waveguide properties for applications in laser sources.
研究不足
The study is limited to the effects of proton implantation and annealing on TGG crystal waveguides. The findings may not be directly applicable to other materials or fabrication methods.
1：Experimental Design and Method Selection:
The TGG crystal was synthesized by the Czochralski technique and prepared for proton implantation. The waveguide was fabricated using proton irradiation with specific energy and dose, followed by annealing treatments at different temperatures.
2：Sample Selection and Data Sources:
A TGG crystal wafer was cut and polished to meet optical qualities. The refractive index of the substrate was recorded before implantation.
3：List of Experimental Equipment and Materials:
A prism coupler was used to measure the refractive index, and an optical microscope was employed for imaging. SRIM, RCM, and FD-BPM software were used for simulations.
4：Experimental Procedures and Operational Workflow:
Proton implantation was conducted at room temperature with specific parameters. Annealing treatments were performed at 260?C and 410?C. Optical measurements were taken before and after annealing.
5：Data Analysis Methods:
The dark-mode spectra and refractive index distributions were analyzed. Simulations were conducted to understand the waveguide's properties.
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