研究目的
Investigating the use of laser-induced plasma ablation (LIPA) with a 248 nm KrF excimer laser for microchannel fabrication in fused quartz glass, focusing on the ablation performance and mechanism.
研究成果
The LIPA technique using a 248 nm KrF excimer laser with a stainless-steel target was successfully applied to fabricate high-quality fused quartz glass microchannels. The study demonstrated that the ablation mechanism involves both laser-induced plasma thermal ablation and direct laser–glass interaction due to absorption enhancement by metal residuum. Optimized parameters yielded microchannels with a depth of 28 μm and surface roughness of several hundred nanometers, suitable for biomedical applications.
研究不足
The study acknowledges the complexity of the wet etching system and the toxicity of the liquid environment in traditional LIPA schemes. It also notes the limitations of absorbing layers in existing literature, which are only several hundred nanometers thick and limited to single-pulse operation.
1：Experimental Design and Method Selection:
The study utilized a homemade excimer laser manufacturing system with a commercial KrF excimer laser for LIPA experiments. The laser beam was focused on the glass sample by a 10× UV objective, and the sample position was adjusted using a three-dimensional stage.
2：Sample Selection and Data Sources:
A 1 mm thick UV transparent quartz glass and a 304-type stainless-steel plate were used. The quartz glass's transmittance spectrum was measured prior to ablation.
3：List of Experimental Equipment and Materials:
The equipment included a KrF excimer LPXpro305 laser, He–Ne laser indicator light, homemade mask, UV reflecting mirror, 10× UV objective, three-dimensional stage, and surface profiler.
4：Experimental Procedures and Operational Workflow:
The laser beam was aligned and directed through a mask, then focused on the glass sample. The sample's position was adjusted for microchannel dimensions and ablation pattern control. After ablation, the etched depth and surface roughness were measured.
5：Data Analysis Methods:
The ablation depth and surface roughness were measured and analyzed to understand the LIPA mechanism and optimize processing parameters.
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