研究目的
Investigating the effect of thin Au and ZnO layers on the optical properties of 1D Photonic Crystal (PhC) structures patterned in LED surfaces to enhance light extraction efficiency.
研究成果
The highest LEE was achieved for 600 nm PhC period in the case of bare and Au deposited PhC, and for 500 nm PhC period in the case of ZnO deposited PhC. The best results were achieved for Au deposited PhC LED sample with LEE of 59%. The application of thin metallic and oxide layers on 1D PhC structures modifies the radiation pattern diagram and improves LEE.
研究不足
The study is limited to 1D PhC structures and does not explore 2D or 3D PhC structures. The effect of deeper etch depths and different materials for the thin layers on LEE was not investigated.
1：Experimental Design and Method Selection:
Electron-beam direct writing lithography was used for patterning 1D PhC structures on LED surfaces.
2：Sample Selection and Data Sources:
Three sets of 1D PhC LED samples with bare PhC, thin Au, and ZnO layers were prepared.
3：List of Experimental Equipment and Materials:
ZBA 23 e-beam pattern generator, HSQ XR 1541 resist, reactive ion etching (RIE) process in CCl4/He based plasma, SEM (Jeol 7500), AFM (Park Systems XE-100).
4：0). Experimental Procedures and Operational Workflow:
4. Experimental Procedures and Operational Workflow: Substrate cleaning, resist spin-coating, EBDW lithography, resist development, RIE process, resist removal, SEM and AFM analysis, current-voltage and light-current measurement.
5：Data Analysis Methods:
L-I characteristics measurement, SEM and AFM imaging, goniophotometer measurements for 3D far-field optical characterization.
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