研究目的
To develop an on-chip integrated optical switch with multilayer for signal manipulation, combining the advantages of high thermo-optic and electro-optic coefficients of optical polymers.
研究成果
The demonstrated 3D integrated optical switch successfully combines the functions of adjustable 3D optical connection and high-speed modulation, with potential applications in polymer-based photonic integrated circuits and polymer/silica hybrid integrated devices.
研究不足
The insertion loss of the device was about 16.3 dB, which includes various losses such as coupling loss, vertical coupling loss, propagation loss, bending loss, and splitting loss. The response time of the TO switch is about 750 μs, which may limit its application in ultra-high-speed systems.
1：Experimental Design and Method Selection:
The study involves the design and fabrication of a 3D integrated optical switch using polymer waveguides, incorporating a vertical coupler for TO effect and an MZI with EO polymer-clad waveguide for high-speed modulation.
2：Sample Selection and Data Sources:
The materials used include SU-8 2002 as the core material and P(MMA-GMA) as the cladding material, with MS-TCF doped into P(MMA-GMA) as the guest material of EO polymer.
3：List of Experimental Equipment and Materials:
Equipment includes a photolithography system, ICP etching system, and an M ? 2000 UI variable angle incidence spectroscopic ellipsometer. Materials include SU-8 2002, P(MMA-GMA), and MS-TCF.
4：Experimental Procedures and Operational Workflow:
The fabrication process involves spin-coating, photolithography, ICP etching, and thermal evaporation for electrode deposition.
5：Data Analysis Methods:
The performance of the device was characterized using a planar optical waveguide testing system, with optical power and response times measured.
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