研究目的
To perform fully three-dimensional (3D), time-dependent measurements of the magnetic field, electron density, and electron temperature for an inductively coupled plasma (ICP) sustained in argon in an industrial reactor designed for plasma etching in microelectronics fabrication, and to compare these measurements with modeling results.
研究成果
The simultaneous, multi-dimensional, and time-dependent measurements of nearly all pertinent plasma properties have enabled confirmation and clarification of the global mode of operation of ICPs of industrial interest. The measurements and accompanying modeling have contributed to quantifying physical phenomena necessary to understand fundamental plasma transport in ICP chambers.
研究不足
The experiment does not cover the entire volume of the plasma, and the model was used to rescale the experimentally derived power deposition to that deposited in the entire reactor. The measurements could not be performed in the sheath directly under the coil, which might account for additional power dissipation by ion acceleration by capacitive electric fields from the coil.
1：Experimental Design and Method Selection:
The plasma was generated using pulsed power delivered at 2 MHz by a planar coil. The magnetic field was measured using a three-axis magnetic probe at 15,366 locations throughout the plasma volume during the H-mode portion of the pulse at temporal intervals of 2 ns. A swept Langmuir probe was used to measure plasma parameters at the same locations. The plasma density measurement was calibrated with line-integrated densities obtained using a 96 GHz interferometer.
2：Sample Selection and Data Sources:
The ICP consists of a cylindrical chamber producing argon plasmas at pressures of 10–50 mTorr. A three-turn circular stovetop antenna, mounted on top of a 2.8 cm thick alumina window, was connected to an RF generator operating at a 2 MHz delivering power up to 1 kW.
3：8 cm thick alumina window, was connected to an RF generator operating at a 2 MHz delivering power up to 1 kW.
List of Experimental Equipment and Materials:
3. List of Experimental Equipment and Materials: Three-axis magnetic probe, swept Langmuir probe, 96 GHz microwave interferometer, emissive probe, cylindrical Langmuir probe, hairpin probe, Helmholtz coil, vector network analyzer, Si photodiode.
4：Experimental Procedures and Operational Workflow:
Probes were inserted from the front side of the chamber through a ball valve feedthrough allowing free rotation of the probe shaft through spherical coordinates. The probe motion is driven by a 3D drive. Data were acquired using a 4 channel 2.5 GS/s, 12 bit oscilloscope.
5：5 GS/s, 12 bit oscilloscope.
Data Analysis Methods:
5. Data Analysis Methods: The data were analyzed by first integrating the three temporal signals recorded from the magnetic probe. The gradient calculation was performed by either a three-point quadratic Lagrangian interpolation or a 1st or 2nd order finite difference method.
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