研究目的
To demonstrate ultra-low power refractive index tuning in a hybrid barium titanate (BTO)-silicon nitride (SiN) platform integrated on silicon by exploiting the large electric field-driven Pockels effect in ferroelectric BTO thin films.
研究成果
The study demonstrates ultra-low power refractive index tuning in silicon-integrated hybrid BTO-SiN photonic devices with a static power consumption of approximately 106 nW/FSR in racetrack resonator devices. The technology allows for the compensation of thermal refractive index variations and the fabrication of multi-resonator optical filters, significantly advancing the field of ultra-low power integrated photonic devices.
研究不足
The tuning range can be significantly increased for a given electric field and the resonator devices can be optimized for low-bias operation. Example optimizations include improvements to the electrode design and the use of thicker BTO in future devices.
1:Experimental Design and Method Selection:
The study involves the fabrication of hybrid BTO-SiN racetrack resonators and the demonstration of electrically tuning the effective refractive index. The methodology includes the use of the Pockels effect in BTO for refractive index tuning.
2:Sample Selection and Data Sources:
Epitaxially grown 80 nm single crystalline BTO thin films on silicon-on-insulator substrates, transferred to thermally oxidized silicon wafers via wafer-bonding.
3:List of Experimental Equipment and Materials:
Molecular beam epitaxy for BTO thin films, plasma-enhanced chemical vapor deposition (PECVD) for SiN deposition, e-beam lithography and reactive ion etching for waveguide patterning, tungsten deposition for side electrodes.
4:Experimental Procedures and Operational Workflow:
Light from a fiber-coupled, tunable continuous-wave laser operating around
5:55 μm was coupled into and out of the devices via grating couplers and detected with a power meter. A parameter analyzer was used to apply the bias to the devices and to determine the leakage currents. Data Analysis Methods:
Resonance shifts Δλ for different electric fields were measured and converted to effective refractive index shifts Δneff using a specific relation.
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