研究目的
To fabricate a MoS2-based photodetector with ultrasensitive optoelectronic performances in a broad spectral range by forming a mono-/multi-layer nano-bridge multi-heterojunction structure.
研究成果
The serial nano-bridge multi-heterojunction photodetector structure demonstrated ultrasensitive optoelectronic performances in a broad spectral range, offering potential applications in broadband light sensing, highly sensitive fluorescence imaging, ultrasensitive biomedical diagnostics, and ultrafast optoelectronic integrated circuits.
研究不足
The study focuses on MoS2-based photodetectors and may not be directly applicable to other materials without further research. The fabrication process requires precise control, which may limit scalability.
1:Experimental Design and Method Selection:
The study involved the fabrication of MoS2 FETs with serial nano-bridge multi-heterojunctions through selective layer control of multi-layer MoS
2:Sample Selection and Data Sources:
Mechanically exfoliated MoS2 layers were transferred on a 300-nm-thick SiO2/heavily boron-doped Si substrate.
3:List of Experimental Equipment and Materials:
Equipment included a photolithographic process for patterning, an e-beam evaporator for deposition, and various characterization tools like Raman spectroscopy, PL spectroscopy, AFM, FE-SEM, HAADF STEM, XPS, and KPFM.
4:Experimental Procedures and Operational Workflow:
The process involved patterning the multi-layer MoS2 channel, selective layer control through atomic layer etching (ALE), and characterization of electronic and optoelectronic properties.
5:Data Analysis Methods:
The photoresponsivity and photoresponse time were analyzed using a semiconductor parameter analyzer and other characterization tools.
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MultiLab 2000
2000
Thermo VG
X-ray photoelectron spectroscopy (XPS) for chemical composition and oxidation analysis.
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Keysight B2912A
B2912A
Keysight
Semiconductor parameter analyzer for measuring current-voltage characteristics.
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WITEC alpha 300 M +
alpha 300 M +
WITEC
Raman microscopic system for estimating the number of layers and optical band-gap of MoS2.
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Dimension 3100
3100
Veeco
Atomic force microscopy (AFM) for measuring surface morphology.
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S-4700
S-4700
Hitachi
Field-emission scanning electron microscopy (FE-SEM) for surface morphology analysis.
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JEOL JEM ARM 200 F
JEM ARM 200 F
JEOL
High-angle annular dark-field scanning transmission electron microscopy (HAADF STEM) for atomic structure observation.
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Delos Laser
Delos Laser
Light sources for photodetector testing.
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