研究目的
Investigating the vibrating energy conversion efficiency on piezoelectric transducers fabricated on MEMS buckled diaphragm structures from the viewpoint of crystal orientation of sol-gel derived PZT films.
研究成果
Intermediate oriented films around 40–45% texture to (111) orientation showed the highest conversion efficiency due to a high remanent polarization and a large buckling deflection. The study highlights the importance of crystal orientation in optimizing the performance of piezoelectric MEMS devices.
研究不足
The efficiency drop near purely (100)-oriented films is not clearly explained, suggesting there may be other mechanisms dominating the conversion efficiency in this texture region.
1：Experimental Design and Method Selection:
The study involved controlling the crystal orientation of sol-gel derived PZT films through pyrolysis temperature to investigate its effect on energy conversion efficiency.
2：Sample Selection and Data Sources:
A 2-inch silicon wafer with a 1 μm-thick thermally oxidized SiO2 layer was used as the starting substrate.
3：List of Experimental Equipment and Materials:
Equipment included a hotplate for pyrolysis, a furnace for annealing, and a scanning laser confocal displacement meter for measuring buckling profiles. Materials included sol-gel PZT solution and Pt/Ti and Au films for electrodes.
4：Experimental Procedures and Operational Workflow:
The process involved depositing bottom electrodes, PZT films, and top electrodes, followed by etching and silicon backside etching to complete the diaphragm structures.
5：Data Analysis Methods:
Crystal orientation was characterized with XRD, remanent polarization with a Sawyer-Tower circuit, and conversion efficiency was evaluated as the ratio of output voltage to input sound pressure.
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