研究目的
Investigating the use of a metal-assisted silicon slot waveguide for highly sensitive gas detection, focusing on mid-infrared spectra gas detection with micro-ring air pressure compensation.
研究成果
The proposed metal-assisted silicon slot waveguide sensor demonstrates improved sensitivity and accuracy for gas detection, combining refractive index sensing and infrared absorption. The design shows potential for integrated photonics circuits and future applications in various infrared range active materials.
研究不足
The study acknowledges the challenge of distinguishing gases with similar refractive indices and the need for large-scale gas absorption areas for accurate detection. It also notes the influence of temperature and gas pressure on sensor accuracy.
1：Experimental Design and Method Selection:
The study introduces a metal-assisted silicon slot waveguide for gas detection, utilizing infrared absorption for concentration sensing and refractive index sensing for air pressure detection. The design includes a micro-ring resonator for signal compensation.
2：Sample Selection and Data Sources:
The study focuses on CH4 gas detection, using its absorption peak at 3.31503um for the center wavelength of light signal.
3：31503um for the center wavelength of light signal.
List of Experimental Equipment and Materials:
3. List of Experimental Equipment and Materials: The design includes a silicon slot waveguide with a thin Ag layer, Si3N4 material replacing SiO2, and a micro-ring resonator.
4：Experimental Procedures and Operational Workflow:
The light signal is split into two parts; one part is coupled into a straight waveguide with a micro-ring for refractive index sensing, and the other part is used for gas absorption detection.
5：Data Analysis Methods:
The study uses the Lambert-Beer Law for gas absorption analysis and resonant wavelength shift for refractive index sensing.
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