研究目的
Investigating the crystallization of amorphous bismuth iron garnet films using capacitively coupled oxygen plasmas at lower temperatures than conventional thermal annealing methods.
研究成果
The study demonstrates that iron garnet films can be crystallized by exposure to oxygen plasma at temperatures approximately 100 °C below those required for conventional thermal annealing. The temperature within the plasma is a significant contributor to the crystallization process, correlated with the most active plasma species, atomic oxygen and O+. A conductor in thermal contact with the sample aids crystallization by increasing the sample temperature.
研究不足
The study is limited to the crystallization of bismuth iron garnet films under specific plasma conditions (high pressures and high rf powers). The mechanisms behind the lower temperature crystallization are not fully understood, and the study suggests that additional mechanisms beyond temperature are involved.
1：Experimental Design and Method Selection:
The study used a capacitively coupled quartz barrel asher with a
2：56 MHz rf source to anneal thin film samples in an oxygen plasma environment. The sample temperature was measured using a thermal imaging camera, and the plasma optical emissions were characterized using a spectrometer. Sample Selection and Data Sources:
Thin film garnet samples 300 nm in thickness were deposited on fused quartz substrates at low temperature (150 °C) by rf-sputtering.
3：List of Experimental Equipment and Materials:
A March Instruments PM-600 barrel asher, RF-10S rf source by Advanced Energy, Testo-885 thermal imaging camera, Verity Instruments spectrometer (SD1024DF), and a Langmuir probe were used.
4：Experimental Procedures and Operational Workflow:
Samples were exposed to oxygen plasma under varying rf powers and chamber pressures for 15 min. The crystalline structure was evaluated by GI-XRD, and the optical transmission and Faraday rotation were measured.
5：Data Analysis Methods:
The electron temperature within the plasma was estimated using a Langmuir probe, and the optical emission spectra were analyzed to determine the presence of various species in the plasma.
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rf source
RF-10S
Advanced Energy
Generating rf power for the plasma
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thermal imaging camera
Testo-885
Testo
Measuring the sample temperature
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spectrometer
SD1024DF
Verity Instruments
Characterizing the optical emission of the oxygen plasma
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XRD system
Empyrean
Panalytical
Evaluating the crystalline structure of the samples
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barrel asher
PM-600
March Instruments
Annealing thin film samples in an oxygen plasma environment
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Langmuir probe
Estimating the electron temperature within the plasma
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