研究目的
To address the time-consuming and throughput-limiting nature of sequential laser scanning in material processing by introducing a parallelization strategy using ultrasound waves in a liquid to diffract light into multiple beamlets, enabling high-throughput laser processing.
研究成果
The study demonstrates that acousto-optofluidic systems can significantly enhance the throughput, speed, and ease of use in laser material processing by enabling dynamic multifocus generation. This approach opens new possibilities for applications in imaging, optical trapping, and beyond.
研究不足
The system's flexibility is limited by the symmetry constraint in pattern generation when using the brush-like mode. Higher driving amplitudes could explore novel acousto-optic interaction regimes for more complex light shaping.
1：Experimental Design and Method Selection:
The study modified a conventional laser direct writing system to include an acousto-optofluidic device at a conjugate plane of the back pupil of the focusing objective. The device uses mechanical vibrations in a liquid to induce harmonic variations of the liquid density, and hence its refractive index, to diffract light into multiple beamlets.
2：Sample Selection and Data Sources:
The experiments involved locally modifying the morphological and wettability properties of metals, polymers, and ceramics.
3：List of Experimental Equipment and Materials:
The setup included a laser direct-writing workstation with a Ti:Sapphire amplifier, optics for beam guidance and focusing, a fast XYZ stage, and an acousto-optofluidic device consisting of piezoelectric plates in a liquid-filled cavity.
4：Experimental Procedures and Operational Workflow:
The system was used to generate multifocus distributions by adjusting the driving frequency, amplitude, or phase of the ultrasound waves, combined with sample translation for high-throughput processing.
5：Data Analysis Methods:
The diffraction efficiency and spatial coordinates of the multifocus distributions were analyzed to validate the system's tunability and speed.
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Ti:Sapphire amplifier
Legend
Coherent
Generating ultrashort laser pulses for material processing
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CMOS camera
DCC1545M
ThorLabs
Recording the multifocus distribution
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Arbitrary waveform generator
33521A
Agilent
Driving the AOF device
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XYZ stage
Prior Scientific, Inc.
Precise positioning of samples during laser processing
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Microscope objective
M Plan Apo SL 50 ×, 0.75 NA
Mitutoyo
Focusing the laser beam onto the sample
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