研究目的
To measure the hydrogen atom density in Ar/H2 inductively coupled plasmas (ICP) using vacuum ultraviolet absorption spectroscopy (VUVAS) with a micro-hollow cathode H2/He discharge lamp (MHCL), considering the self-absorption effect.
研究成果
The hydrogen atom density in Ar/H2 ICP was successfully measured using VUVAS with a MHCL, considering self-absorption effects. The density varied from 2.1 × 1011 cm?3 to 1.25 × 1012 cm?3 with increasing plasma power. The method can be expanded to measure densities of other atomic species.
研究不足
The study is limited to low-pressure conditions (30 mTorr–50 mTorr) and requires careful consideration of self-absorption effects in the light source for accurate measurements.
1：Experimental Design and Method Selection:
The study employs vacuum ultraviolet absorption spectroscopy (VUVAS) with a micro-hollow cathode H2/He discharge lamp (MHCL) to measure hydrogen atom density in ICP, considering self-absorption effects.
2：Sample Selection and Data Sources:
The experiment uses Ar/H2 mixture plasmas generated in a cylindrical ICP reactor. The hydrogen atom density is measured for various powers (50 W–850 W) and pressures (30 mTorr–50 mTorr).
3：List of Experimental Equipment and Materials:
Equipment includes a cylindrical ICP reactor, VUV monochromator, MHCL, mass flow controllers, Langmuir probe, and spectrometers.
4：Experimental Procedures and Operational Workflow:
The ICP is generated with varying powers and pressures. The VUVAS method is applied to measure hydrogen atom density, with adjustments for self-absorption in the MHCL.
5：Data Analysis Methods:
The hydrogen atom density is derived from the absorption of the Lyman-α line, considering Doppler broadening and gas temperatures.
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获取完整内容-
VUV monochromator
234/302, 2400 groove/mm
McPherson
To obtain VUV spectra from the ICP and/or MHCL
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Charge coupled device
DO420A
ANDOR
To detect the VUV spectra
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MgF2 window
D = 50 mm
Edmund
To separate the vacuum condition of the monochromator from the ICP chamber
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Turbo pump
PM Z01 300 AT
Pfeiffer
To sustain the vacuum condition in the monochromator
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RF generator
YSR-10AF
YoungSin RF
To generate the RF power for the ICP
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Mass flow controller
GMC1200
Atovac
To control the discharge gases (Ar/H2 mixture)
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Single Langmuir probe
Impedans Ltd
To measure the electron density and temperature
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