研究目的
To synthesize pure Tetragonal Tungsten Bronze (TTB) phase thin films in the (K,Na)-Nb-O system (KNN) using pulsed laser deposition and characterize their structural and dielectric properties.
研究成果
Pure tetragonal tungsten bronze phase films were successfully grown by PLD in the KNN system. The films exhibited high dielectric permittivity (εr > 120) up to 40 GHz. However, high leakage currents restricted the electrical measurements, and no ferroelectricity was evidenced for the undoped KNN TTB films.
研究不足
High leakage currents made it impossible to switch the TTB polarization under an external DC electric field without destroying the sample. The dielectric measurements were complicated by these high leakage currents.
1:Experimental Design and Method Selection
Pulsed laser deposition (PLD) technique was used with a KrF excimer laser to synthesize thin films. The target composition and the target-substrate distance were optimized to control the alkaline elements' volatility.
2:Sample Selection and Data Sources
Thin films were deposited on single crystals (100) and (110) SrTiO3, C-plane sapphire, and (111)Pt/TiO2/SiO2/(001)Si substrates.
3:List of Experimental Equipment and Materials
KrF excimer laser (Coherent company), SEM (JSM 7100F, JEOL and MIRA3 Tescan), TEM (JEOL 2100), XRD (D8 Advance, BRUKER), Raman spectrometer (Renishaw Invia), PFM (NTEGRA NT-MDT system).
4:Experimental Procedures and Operational Workflow
Films were deposited under 0.3 mbar oxygen pressure, at temperatures between 600–650°C, with target-substrate distances from 55 to 65 mm. The deposition rate was approximately 15 nm/min at 2 Hz and 30 nm/min at 4 Hz.
5:Data Analysis Methods
Structural characteristics were analyzed by XRD and TEM. Dielectric properties were measured at low (1 kHz - 1 MHz) and high (1 GHz - 40 GHz) frequencies. Raman spectroscopy was used to confirm the TTB phase formation.
独家科研数据包,助您复现前沿成果,加速创新突破
获取完整内容