研究目的
To research the effects of an external magnetic field on the micro-structure of diamond-like carbon film prepared by pulsed laser deposition, focusing on its optical property, surface morphology, and atomic bonds.
研究成果
The external magnetic field significantly influences the micro-structure of DLC films prepared by PLD, leading to changes in optical properties, surface morphology, and an increase in sp3 bond content. The magnetic field confines the surface diffusion of charged particles, improving the film's density and optical properties.
研究不足
The research focuses on the effects of an external magnetic field on the micro-structure of DLC films prepared by PLD. The study does not explore the influence of varying magnetic field intensities on the film properties, which could be an area for future research.
1：Experimental Design and Method Selection:
The DLC film was deposited by pulsed laser deposition (PLD) in an external magnetic field. A KrF excimer laser was used for the deposition process.
2：Sample Selection and Data Sources:
High oriented pyrolytic graphite (HOPG) target was used, and polished silicon substrates were prepared for film deposition.
3：List of Experimental Equipment and Materials:
KrF excimer laser (Compex 205 by Coherent Inc.), Tesla meter (TD8620), ellipsometry (V-VASE by J A Woollam Co. Inc.), AFM (VEECO Multimode 8), Raman microscope (HR 800 by Horiba), Nano-hardness tester (Agilent Nano Indenter G200).
4：0). Experimental Procedures and Operational Workflow:
4. Experimental Procedures and Operational Workflow: The film was deposited with and without an external magnetic field, and the properties of the films were characterized using various techniques.
5：Data Analysis Methods:
Optical constants, surface morphology, and atomic bonds were analyzed using ellipsometry, AFM, and Raman spectroscopy, respectively.
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Ellipsometry
V-VASE
J A Woollam Co. Inc.
Used to measure the optical constants of the DLC films.
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Atomic force microscope
VEECO Multimode 8
VEECO
Used to measure the surface morphology of the DLC films.
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Nano Indenter
G200
Agilent
Used to measure the nano-hardnesses of the DLC films.
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KrF excimer laser
Compex 205
Coherent Inc.
Used for the pulsed laser deposition (PLD) process to deposit DLC films.
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Tesla meter
TD8620
Used to measure the magnetic strength near the substrate.
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Raman microscope
HR 800
Horiba
Used to carry out Raman measurements of the DLC films.
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