研究目的
Investigating the formation of periodic superhydrophilic microstructures on single-crystal silicon surfaces through infrared and visible nanosecond laser processing, and understanding their formation conditions and mechanisms.
研究成果
The study demonstrates that two types of micrometer-scale surface structures can be produced on single-crystal silicon with IR pulses in a narrow laser fluence range. The periodic microhillocks formed at the nodes of a crack grid under specific conditions lead to superhydrophilic properties of the silicon surface, which are stable over time. The presence of oxygen is crucial for the formation of microhillocks, while cracks can form in any environment. Further studies are needed to clarify the formation mechanisms of these microstructures.
研究不足
The study is limited to the specific conditions of nanosecond laser processing of single-crystal silicon and does not explore other materials or laser pulse durations. The mechanisms of microhillock formation are not fully understood and require further investigation.
1：Experimental Design and Method Selection:
The study involved irradiating single-crystal silicon (100) wafers with Nd:YAG laser pulses at 1064 nm and 532 nm wavelengths under various conditions to observe the formation of periodic microstructures.
2：Sample Selection and Data Sources:
Single-crystal silicon wafers were cleaned and irradiated in a vacuum chamber with varying air pressures and different background gases.
3：List of Experimental Equipment and Materials:
Nd:YAG laser, vacuum chamber, glass lens, beam attenuator, pyroelectric detectors, drop shape analyzer, optical microscopy, and scanning electron microscopy.
4：Experimental Procedures and Operational Workflow:
The laser beam was focused onto the target at normal incidence, with the spot size and fluence varied. The wettability properties were characterized using a sessile drop technique.
5：Data Analysis Methods:
The morphology and composition of the irradiated samples were studied using optical microscopy and scanning electron microscopy, with wettability properties analyzed through contact angle measurements.
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