研究目的
Investigation for Sidewall Roughness Caused Optical Scattering Loss of Silicon-on-Insulator Waveguides with Confocal Laser Scanning Microscopy
研究成果
The study concluded that the sidewall roughness-caused optical loss is dependent on both the correlation length and the waveguide width, in addition to the SWR itself. The upper limit of the correlation length was identified as a critical factor in reducing optical loss. The findings are significant for the development of high-quality industrial devices and systems, suggesting specific designs for silicon dioxide films to compress optical loss.
研究不足
The measurement accuracy was 10 nm, which may not be sufficient for roughness smaller than 10 nm. The ICP fabrication of the waveguide samples needs improvement to achieve lower optical propagation loss.
1：Experimental Design and Method Selection:
The study involved theoretical analysis of waveguide sidewall roughness (SWR) and its impact on optical losses, followed by accurate SWR measurements using confocal laser scanning microscopy (CLSM). A theoretical/experimental combinative model was developed to define SWR-caused optical propagation loss.
2：Sample Selection and Data Sources:
An SOI-waveguide sample with specific dimensions was selected for CLSM measurements to analyze SWR distribution.
3：List of Experimental Equipment and Materials:
Commercial CLSM tool–LSM710 by ZEISS was used for measurements. The SOI-waveguide sample had a BOX layer of 2.0 and 1.5 μm, with waveguide ribs of 4.0 μm width and 0.5 μm height etched using ICP etching technique.
4：0 and 5 μm, with waveguide ribs of 0 μm width and 5 μm height etched using ICP etching technique.
Experimental Procedures and Operational Workflow:
4. Experimental Procedures and Operational Workflow: The CLSM system was used to measure the isotropic roughness of the waveguide sidewalls. The roughness was defined and calculated based on the root mean square (rms) of peak-to-valley periods.
5：Data Analysis Methods:
The optical propagation loss was simulated based on the measured SWR values and the developed model. The Fabry–Perot (F-P) resonance method was used to measure the optical propagation loss of the waveguide.
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