研究目的
To develop a technique for the effective and efficient shaping of both the sensory layer (graphene) and the metallic electrodes (gold) on a ceramic substrate using a Nd:YAG nanosecond fiber laser.
研究成果
The laser patterning method developed allows for the simultaneous shaping of graphene and gold layers on a ceramic substrate without significant damage, offering high speed, repeatability, and the ability to shape any simple geometries without a masking process. The technique is effective for the production and trimming of sensors based on graphene, with potential applications in cryogenic temperature sensing.
研究不足
The temperature range of the sensor is limited to cryogenic temperatures due to the electrode assembly technique (indium alloy soldering). The method requires miniaturization and encapsulation of the layer to stabilize parameters for applications above room temperature.
1：Experimental Design and Method Selection:
The study utilized a Nd:YAG fiber laser for patterning graphene and gold electrodes on a ceramic substrate. The laser processing parameters were optimized for effective ablation without damaging the substrate.
2：Sample Selection and Data Sources:
Samples were prepared by transferring a graphene layer onto an Al2O3 ceramic substrate with pre-deposited gold electrodes. The graphene was transferred using PMMA as a supporting material.
3：List of Experimental Equipment and Materials:
Equipment included a Nd:YAG fiber laser, optical and scanning electron microscopes, a Raman spectrometer, and a cryogenic cooling system for electrical property measurements.
4：Experimental Procedures and Operational Workflow:
Laser patterning was performed with varying pulse energies to achieve complete ablation of graphene and gold layers. The effectiveness of the patterning was assessed through microscopic examination, Raman spectroscopy, and electrical conductivity measurements across a temperature range of 15–295 K.
5：Data Analysis Methods:
Raman spectroscopy was used to analyze the quality of the graphene post-patterning. Electrical properties were measured to assess the impact of laser processing on the sensor's performance.
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Optical microscope
Neophot 21
Carl-Zeiss Jena
Assessing the quality of the patterning of the graphene structures.
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SEM
Hitachi S-4200
Hitachi Ltd.
Examining the quality of the patterning of the graphene structures.
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Cryostat
DE-210
Advanced Research Systems, Inc.
Measuring the electrical properties of graphene on the ceramic substrate across a temperature range.
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Micro-Ohm Meter
Keysight 34420A
Keysight Technologies
Measuring the resistance of the samples.
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Nd:YAG fiber laser
SPI G3 SM fiber laser
SPI Lasers UK Ltd.
Used for patterning the graphene layer and gold electrodes on a ceramic substrate.
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F-theta lens
GEOMATEC
GEOMATEC Co., Ltd
Focusing the laser beam for precise patterning.
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Beam scanner
Xtreme beam scanner
Nutfield Technology Inc.
Directing the laser beam for patterning.
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Raman spectrometer
Renishaw inVia
Renishaw plc
Analyzing the quality of the graphene post-patterning.
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