研究目的
Investigating the capability of high vertical and lateral resolution grayscale printing of polymeric nanopixels by optically controlling the capillary rise of certain photopolymers.
研究成果
The study demonstrates nanoscale optical control of the photopolymer’s capillary rise into elastomeric nanocavities, enabling high lateral resolution grayscale printing of polymeric nanopixels. The dynamic micromirror-based setup offers a reconfigurable and scalable printing technique. The research also expands the understanding of the nanoscale capillary effect, revealing phenomena such as instability in capillary rise and virtual air permeability.
研究不足
The technique requires optimization of UV light and its spatial modulation to improve printing quality and resolution. The light diffusion and UV-dose averaging effects can deteriorate the high-contrast, high-resolution patterns.
1:Experimental Design and Method Selection:
The study utilizes optically controlled capillary force lithography (CFL) for grayscale printing of polymeric nanopixels. The method involves controlling the capillary rise of photopolymers into elastomeric nanocavities with sub-10-nm accuracy.
2:Sample Selection and Data Sources:
Cylindrical nanocavities formed on hard poly(dimethylsiloxane) (h-PDMS) slabs through replica molding of arrayed silicon nanoposts were used. NOA73, a UV-curable polymer, was chosen as the capillary-filling polymer.
3:List of Experimental Equipment and Materials:
h-PDMS mixture, NOA73 photopolymer, digital micromirror device (DLP Discovery 4100, Texas Instruments), UV light source (M365LP1-C2, Thorlabs), atomic force microscopy (AFM), scanning electron microscopy (SEM).
4:Experimental Procedures and Operational Workflow:
The process includes spin-coating NOA73, precuring by UV irradiation, conformal contact with h-PDMS nanocavity array, capillary rise controlled by UV dose, postcuring, and release of nanoposts.
5:Data Analysis Methods:
Characterization of nanopost height and shape using AFM and SEM, analysis of re?ection spectra for plasmonic metasurfaces.
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