研究目的
To demonstrate a high resolution non-intrusive displacement sensor working on the principle of basic Laser Doppler Vibrometer (LDV) through phase multiplication using multiple reflections within a high-Q cavity.
研究成果
The multiple reflection scheme in LDV allows for high-resolution displacement measurement down to 72 nm with potential for sub-nanometer resolution. The linear relationship between displacement and number of reflections provides a straightforward measurement method, with resolution limited by mirror reflectivity and dimensions.
研究不足
The technique is primarily suited for sinusoidal disturbances and may require phase meters for picometer resolution. The angle of incidence must be small to minimize errors.
1：Experimental Design and Method Selection:
The design utilizes a high-Q cavity for phase multiplication via multiple reflections between a vibrating surface and a high reflection mirror.
2：Sample Selection and Data Sources:
A vibrating mirror and a high reflection mirror are used as reflecting objects.
3：List of Experimental Equipment and Materials:
He-Ne laser, non-polarizing beam splitter, retro-reflector prism, piezoelectric transducer (PZT), fast photo-detector, oscilloscope.
4：Experimental Procedures and Operational Workflow:
A collimated He-Ne laser beam is split, reflected off a vibrating mirror, and interfered with a reference beam. The interference pattern is detected and analyzed.
5：Data Analysis Methods:
Displacement is measured by counting characteristic peaks in the interference pattern, with resolution enhanced by multiple reflections.
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Retro-reflector prism
PS975M-A
Thorlabs
Reflecting the incident beam by 180°
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Piezo-electric crystal
TPZ001
Thorlabs
Generating vibrations
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Oscilloscope
RTB2004
Rohde & Schwarz
Monitoring the detector output
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He-Ne Laser
25-LHP-151-230
Melles Griot
Source for interferometry
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Non-polarizing beam splitter
Splitting the laser beam
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Fast photo-detector
UPD-200-SP
Alphalas
Detecting the interference pattern
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