研究目的
To develop a one-step growth method for the rapid preparation of large-scale doped MoS2 films and to investigate their properties and applications.
研究成果
The PLIS method successfully enables the one-step growth of centimeter-scale doped MoS2 films with p-type characteristics, demonstrating potential for large-scale production and application in electronics. The technique's compatibility with traditional CMOS processes suggests promising prospects for the industrialization of TMDCs.
研究不足
The technique's scalability is dependent on the laser device's capability to provide a larger scanning area. The study focuses on noble metal doping, and the applicability to other doping elements needs further exploration.
1:Experimental Design and Method Selection:
The study employs pulsed laser-induced synthesis (PLIS) for the one-step growth of doped MoS2 films.
2:Sample Selection and Data Sources:
MoS2 films are doped with noble metals (Au, Pt, and Pd) and characterized using various techniques.
3:List of Experimental Equipment and Materials:
Includes a pulsed laser instrument, spin coater, hot plate, and materials like MoCl5, thiourea, and noble metal solutions.
4:Experimental Procedures and Operational Workflow:
Involves preparation of reaction precursor, spin-coating, and PLIS to prepare doped MoS2 films.
5:Data Analysis Methods:
Characterization techniques include optical microscopy, TEM, XPS, AFM, Raman spectroscopy, and electrical measurements of FET devices.
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XPS instrument
AXIS-ULTRA DLD-600W
Shimadzu-Kratos
Used for XPS analysis of the doped MoS2 films.
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AFM
Dimension Edge
Bruker Co.
Used to examine the thickness of the thin films.
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pulsed laser instrument
248 nm KrF excimer laser
Used for the direct irradiation of the SiO2/Si wafer to prepare doped MoS2 films.
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spin coater
Used for spin-coating the reactant solution onto the wafer.
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hot plate
Used for baking the wafer until the reactant solution is dried.
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electron beam lithography
Vistec, Leica
Used to define the source and drain patterns for the FET fabrication.
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electron beam evaporation
Ebeam-500s
Used to deposit the Ti/Au electrodes for the FET.
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optical microscope
SJC-6 50×
Used to analyze the doped MoS2 thin films.
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transmission electron microscope
JEM-2100F
Used for TEM observations of the doped MoS2 films.
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laser-confocal Raman spectrometer
LabRAM HR800
Used to obtain Raman spectra of the doped MoS2 films.
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four-point probe station
SCS 4200
Used to measure the electrical properties of the FET based on Au-doped MoS2.
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