1：Experimental Design and Method Selection:

The CdS:O layer was synthesized on commercially available soda-lime glass (SLG) by using a reactive radio frequency (RF) sputtering in 1.5% oxygen (O2)/argon (Ar) ambient as a function of substrate temperature (25 °C to 300 °C).

2：5% oxygen (O2)/argon (Ar) ambient as a function of substrate temperature (25 °C to 300 °C). Sample Selection and Data Sources:

2. Sample Selection and Data Sources: Commercially available laboratory-grade soda-lime glass (SLG) was used as a substrate for CdS thin films.

3：List of Experimental Equipment and Materials:

Panalytical Diffractometer X-ray diffraction (XRD), SHIMADZU UV-2600, UV-Vis spectrophotometer, RF sputtering chamber.

4：Experimental Procedures and Operational Workflow:

The CdS:O thin films were deposited on SLG substrate from a 50 mm diameter analytical grade (99.99%) CdS. Ultra-pure Argon (Ar) was used as a process gas whose flow rate was regulated to 16 SCCM by a mass flow controller through lab view interface. The RF power of the CdS target was kept 30 W during the deposition.

5：99%) CdS. Ultra-pure Argon (Ar) was used as a process gas whose flow rate was regulated to 16 SCCM by a mass flow controller through lab view interface. The RF power of the CdS target was kept 30 W during the deposition. Data Analysis Methods:

5. Data Analysis Methods: The structural and optical properties of the as-grown CdS:O thin films were carried out by X-ray diffraction and UV-VIS-Spectroscopy respectively.