研究目的
To develop commercially fabricated multi-chronic antenna-coupled transition edge sensor (TES) bolometer arrays for cosmic microwave background (CMB) polarimetry experiments to meet the increased detector count requirements for next-generation CMB experiments.
研究成果
The successful design, fabrication, and testing of an antenna-coupled TES bolometer array with SeeQC, Inc. demonstrate the potential for commercial foundries to meet the detector fabrication challenges for next-generation CMB experiments. The performance, yield, and throughput results are encouraging, with further improvements possible to address identified bottlenecks.
研究不足
The e-beam evaporation step was identified as a bottleneck in the process, taking three times longer than other steps due to the machine's limitation of processing one wafer at a time. Future improvements include moving this step to a high-throughput e-beam evaporator.
1：Experimental Design and Method Selection:
The detector design was based on a sinuous antenna-coupled TES bolometer array fabricated for POLARBEAR/Simons Array and Simons Observatory. The detectors are fabricated on 150-mm silicon wafers with low-stress silicon nitride films.
2：Sample Selection and Data Sources:
The fabricated detector arrays were tested for RF characteristics and TES bolometer properties suitable for CMB observations.
3：List of Experimental Equipment and Materials:
Equipment includes a Nb/SiN/Nb trilayer deposition system, reactive ion plasma etcher, e-beam evaporator, and XeF2 machine. Materials include silicon wafers, silicon nitride films, niobium, titanium, palladium, and manganese-doped aluminum.
4：Experimental Procedures and Operational Workflow:
The fabrication process involves deposition, etching, patterning, and release of the TES bolometer from the substrate.
5：Data Analysis Methods:
Performance, yield, and uniformity of the detector arrays were analyzed using automated metrology tools and cryogenic characterization.
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