研究目的
Investigating the epitaxial growth of monolayer MoS2 on different terminations of single crystal SrTiO3 substrates for applications in nanoelectronics.
研究成果
The orientations and shapes of MoS2 crystals are strongly influenced by substrate interactions with SrTiO3, maximizing interfacial van der Waals bonding via coincidence epitaxy. This allows for the synthesis of large-scale uniform MoS2 layers with optimal electronic properties, improving their applicability in next-generation nanoelectronic devices.
研究不足
The study is limited to the growth and characterization of MoS2 on SrTiO3 substrates with specific terminations. The exact interface at the time of CVD growth is not known due to the surface reconstructions prepared in vacuum not surviving in atmosphere.
1:Experimental Design and Method Selection:
Chemical vapor deposition (CVD) was used to grow MoS2 monolayers on SrTiO3 substrates with different terminations. The substrates were prepared by Ar+ ion sputtering and annealing in ultra-high vacuum (UHV) to ensure crystallinity.
2:Sample Selection and Data Sources:
SrTiO3 single crystals doped with Nb at
3:5% by weight were used as substrates. MoS2 was synthesized using molybdenum trioxide (MoO3) and sulfur (S) as precursors. List of Experimental Equipment and Materials:
A custom-built JEOL JSTM 4500s model UHV STM, Zeiss Merlin and Hitachi-4300 SEM, JY Horiba LabRAM ARAMIS imaging confocal Raman microscope.
4:Experimental Procedures and Operational Workflow:
The substrates were placed in a CVD setup with MoO3 and S precursors, heated to specific temperatures, and allowed to react for 30 minutes. The samples were then characterized using SEM, STM, Raman spectroscopy, and PL spectroscopy.
5:Data Analysis Methods:
The orientation of MoS2 crystals was analyzed using SEM images. Raman and PL spectra were analyzed to determine the strain and defect levels in the MoS2 monolayers.
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KOH
1 M aqueous solution
Sigma-Aldrich
Etching SiO2 layer
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JEOL JSTM 4500s
custom-built
JEOL
STM imaging
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JY Horiba LabRAM ARAMIS
imaging confocal Raman microscope
JY Horiba
Raman and PL spectroscopy
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MoO3
powder, ≥99.5%
Sigma-Aldrich
Precursor for MoS2 synthesis
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S
powder, ≥99.5%
Sigma-Aldrich
Precursor for MoS2 synthesis
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PMMA
8 wt% in anisole, 495k molecular weight
Spin-coating for MoS2 transfer
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Zeiss Merlin
Zeiss
SEM imaging
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Hitachi-4300
Hitachi
SEM imaging
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