研究目的
Investigating the use of nanomaterials based on SiO2-SnO2-In2O3 as sensitive elements of vacuum sensors and understanding the mechanisms behind their sensory response to pressure changes.
研究成果
The study demonstrates that nanomaterials based on SiO2-SnO2-In2O3 can serve as effective sensitive elements for vacuum sensors, with their sensory response significantly influenced by the mass fraction of indium oxide. The findings suggest potential for further optimization and application in sensor technology.
研究不足
The study does not fully explain the mechanisms behind the atypical increase in resistance with decreasing pressure for high concentrations of indium oxide, suggesting the need for further research.
1：Experimental Design and Method Selection:
The study involved the synthesis of nanomaterials based on SiO2-SnO2-In2O3 using sol-gel technology with specific precursors and conditions.
2：Sample Selection and Data Sources:
Nanomaterials were formed on substrates of monocrystalline oxidized silicon, with varying mass fractions of indium oxide.
3：List of Experimental Equipment and Materials:
Used precursors included tetraethoxysilane, tin (II) chloride dehydrate, indium nitrate, with hydrochloric acid as a catalyst and ethanol as a solvent.
4：Experimental Procedures and Operational Workflow:
Annealing was carried out at 600 °C in air, and contact pads were made using silver conductive adhesive.
5：Data Analysis Methods:
The sensory response was measured using a multimeter Mastech MS8229, with resistance changes analyzed as a function of pressure.
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