研究目的
Investigating the fabrication of a patch antenna on AlN ceramic substrate with surrounding air cavity and TCV holes to increase bandwidth.
研究成果
The study successfully presents a patch antenna on AlN ceramic substrate with air surrounding cavity and TCV holes, demonstrating a significant increase in bandwidth. The batch-mode μUSM process shows high machining precision and quality, though challenges remain in controlling the machining process due to varying wear ratios and feature sizes.
研究不足
High wear ratio at first step machining and significantly lower feature size of TCV make the machining process complex and uncontrollable. Too much height or width of air cavity influences signal directivity and decreases signal property.
1：Experimental Design and Method Selection:
The study employs batch-mode micro-ultrasonic-machining (μUSM) for simultaneous fabrication of surrounding air cavity and TCV holes on AlN ceramic substrate.
2：Sample Selection and Data Sources:
Uses a 2-inch wafer of AlN ceramic.
3：List of Experimental Equipment and Materials:
Batch-mode μUSM system with constant feed force, step cutting tool.
4：Experimental Procedures and Operational Workflow:
Involves step cutting tool machining, deeper part of TCV blind hole machining, air cavity and rest part of TCV blind hole machining, and bottom surface thinning by CMP process.
5：Data Analysis Methods:
Analyzes machining feature resolution, surface roughness, and removal rate.
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