研究目的
Investigating a novel architecture for piezoelectric micromachined ultrasonic transducers (PMUT) to reduce the impact of process variations on the accuracy of the resonant frequency.
研究成果
The proposed toroidal anchoring technique significantly reduces the impact of process variations on the resonant frequency of PMUT devices, with inter- and intra-die resonant frequency standard variations reduced from 101 kHz to 23 kHz and from 20 kHz to 5.9 kHz, respectively. The method was demonstrated to be effective for distance ranging applications.
研究不足
The study is limited to the PiezoMUMPs commercial fabrication technology and may not be directly applicable to other fabrication processes. The impact of support dimensions on PMUT output acoustic power was not fully explored.
1：Experimental Design and Method Selection:
The study employs a toroidal anchoring technique to reduce the impact of process variations on PMUT resonant frequency. Finite-element simulations using COMSOL Multiphysics were performed for device design and to predict the impact of process variations.
2：Sample Selection and Data Sources:
16 chips were fabricated using the PiezoMUMPs commercial fabrication technology, each holding 12 PMUT devices of two different topologies.
3：List of Experimental Equipment and Materials:
EP6 Cascade Probe Station, E5061B Keysight PNA Network Analyzer, GSG probes, THORLABS translation stage.
4：Experimental Procedures and Operational Workflow:
The resonant frequency of the devices was acquired by measuring the s12 scattering parameter between both device electrodes. Ranging measurements were performed using a 4 period-long sine wave with a frequency of
5：4 MHz and an amplitude of 60 Vpp. Data Analysis Methods:
The effectiveness of the proposed anchoring topology was assessed by comparing the resonant frequency variations of PMUT devices with and without toroidal anchoring.
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