研究目的
To develop a reliable technique to transfer MoS2 from epitaxial graphene (EG) onto dielectric substrates without compromising electronic properties, enabling further studies of the intrinsic optical and electronic properties of TMDs grown via van der Waals epitaxy.
研究成果
The study successfully demonstrates a technique for selectively transferring high-quality monolayer MoS2 from EG/SiC substrates to SiO2/Si substrates using Cu adhesion layers, preserving the rotational ordering and intrinsic electronic properties of MoS2. This advance enables further studies of the intrinsic optical and electronic properties of TMDs grown via van der Waals epitaxy and has potential applications in nanoelectronic, optoelectronic, and photonic technologies.
研究不足
The study focuses on MoS2 and EG, and while the methodology is expected to be generalizable to other TMDs and related 2D materials, this has not been experimentally verified. The transfer process may induce tensile strain in the EG, and the impact of this strain on the properties of transferred materials requires further investigation.
1:Experimental Design and Method Selection:
The study employs a dry transfer method using thermal release tape (TRT) and copper (Cu) adhesion layers to selectively delaminate rotationally ordered isolated MoS2 domains from the EG growth substrate. The choice of Cu as the adhesion layer is based on density functional theory (DFT) calculations predicting higher binding energy of MoS2 to Cu compared to graphene.
2:Sample Selection and Data Sources:
CVD-grown MoS2 on EG/SiC substrates is used. The MoS2 domains are characterized before and after transfer.
3:List of Experimental Equipment and Materials:
Equipment includes atomic force microscopy (AFM), scanning electron microscopy (SEM), transmission electron microscopy (TEM), X-ray photoelectron spectroscopy (XPS), Raman spectroscopy, and photoluminescence (PL) spectroscopy. Materials include MoS2, EG/SiC substrates, Cu adhesion layers, and SiO2/Si substrates.
4:Experimental Procedures and Operational Workflow:
The transfer process involves depositing a Cu layer on MoS2/EG/SiC, placing TRT on the Cu/MoS2/EG/SiC substrate, mechanically peeling off the TRT/Cu/MoS2 stack, placing it on a cleaned SiO2/Si substrate, removing the TRT while heating, etching the Cu layer, and rinsing with DI water.
5:Data Analysis Methods:
The structure and properties of the transferred MoS2 are investigated with AFM, SEM, TEM, XPS, Raman spectroscopy, and PL spectroscopy. Charge transport measurements are performed to assess electrical properties.
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