研究目的
Investigating the structure, optical properties, and resistance to sputtering of Mo-coating fabricated using magnetron deposition with simultaneous low-energy ion sputtering.
研究成果
The Mo-coating fabricated with simultaneous magnetron deposition and low-energy ion sputtering exhibits a highly homogeneous nanocrystalline structure with high resistance to sputtering. The spectral reflection coefficient of the coating differs from that of polycrystalline and single-crystalline Mo, indicating the effect of the coating's structure on its optical properties. A theoretical model for the coating formation is proposed, suggesting that the optimal deposition regime and substrate temperature can provide high resistance to sputtering without significant variations in spectral characteristics.
研究不足
The study is limited to Mo-coatings and does not explore other materials. The experimental conditions are specific to the setup used, and results may vary under different conditions.
1：Experimental Design and Method Selection:
The study involves magnetron deposition with simultaneous low-energy ion sputtering. A Mo-polycrystalline mirror serves as the substrate. The deposition rate is higher than the etching rate.
2：Sample Selection and Data Sources:
A polished Mo polycrystalline mirror is used as a substrate. The mirror is made of vacuum-melted pure molybdenum.
3：List of Experimental Equipment and Materials:
Equipment includes a magnetron with a disk cathode, a hollow cylindrical cathode for substrate cleaning, and a Perkin Elmer Lambda 850 spectrophotometer for measuring reflection spectra. Materials include argon as the working gas and molybdenum for the coating.
4：Experimental Procedures and Operational Workflow:
The substrate is cleaned in a hollow cathode prior to deposition. The coating is deposited with simultaneous sputtering by low-energy Ar+ ions. The reflection spectrum of the mirror is measured after several cycles of sputtering.
5：Data Analysis Methods:
X-ray diffraction study is performed using a Brucker D8 Discover diffractometer. Electron microscopy is used to observe morphological changes of the reflection surface.
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