研究目的
Investigating the effect of substrate temperature on the electrical and photoelectric properties of indium-oxide thin films produced by plasma-enhanced reactive thermal evaporation.
研究成果
The study concludes that increasing the substrate temperature during deposition significantly enhances the conductivity of indium-oxide thin films and affects their photoconductivity relaxation time. The changes are attributed to alterations in the grain structure and surface surroundings of the films. The findings suggest potential applications in electronic devices requiring transparent conductive layers.
研究不足
The study is limited to the analysis of indium-oxide thin films produced by a specific method (plasma-enhanced reactive thermal evaporation) and does not compare with films produced by other methods. The maximal frequency of the measuring device was inadequate to record all peaks in the impedance hodograph for one of the samples.
1：Experimental Design and Method Selection:
The study involved the synthesis of indium-oxide thin films by plasma-enhanced reactive thermal evaporation at different substrate temperatures (50, 120, and 150°C). The structure and electrical properties of the films were analyzed.
2：Sample Selection and Data Sources:
Three series of samples were produced, differing in substrate temperature during deposition. The samples were characterized using scanning electron microscopy (SEM), impedance spectroscopy, and photoconductivity measurements.
3：List of Experimental Equipment and Materials:
Hitachi S-2400 microscope for SEM, HP4192A impedance analyzer for impedance measurements, and a light-emitting diode for photoconductivity measurements.
4：Experimental Procedures and Operational Workflow:
The films were synthesized, and their structure was analyzed by SEM. Electrical and photoelectric measurements were conducted, including temperature dependence of conductivity and impedance spectroscopy.
5：Data Analysis Methods:
The impedance data were analyzed using equivalent circuits to model the electrical properties of the films. Photoconductivity decay kinetics were approximated using an extended exponential function.
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