研究目的
To design, fabricate, and optically characterize a Pancharatnam–Berry optical element for the demultiplexing of beams with different polarization and orbital angular momentum states at the telecom wavelength of 1310 nm.
研究成果
The designed silicon metasurface effectively demultiplexes beams with different spin and orbital angular momentum states, demonstrating potential for high-level integration in optical communication systems.
研究不足
The study is limited to the telecom wavelength of 1310 nm and specific OAM values. The fabrication process is complex and requires high-resolution techniques.
1：Experimental Design and Method Selection:
The study involves the design and fabrication of a Pancharatnam–Berry optical element (PBOE) for demultiplexing beams with different polarization and orbital angular momentum states. The geometric phase control is achieved by fabricating properly-oriented subwavelength gratings on a silicon substrate.
2：Sample Selection and Data Sources:
The samples are fabricated using a silicon substrate with subwavelength gratings designed for the telecom wavelength of 1310 nm.
3：List of Experimental Equipment and Materials:
The fabrication involves high-resolution electron beam lithography (EBL) and inductively coupled plasma reactive ion etching (ICP-RIE). Optical characterization is performed using a DFB laser, spatial light modulator (SLM), and various optical components.
4：Experimental Procedures and Operational Workflow:
The fabrication protocol includes EBL for resist mask fabrication and ICP-RIE for pattern transfer onto silicon. Optical characterization involves generating OAM beams with an LCoS SLM and analyzing the far-field output.
5：Data Analysis Methods:
The optical behavior is analyzed based on the far-field intensity distribution and interference patterns to confirm the demultiplexing capability.
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