研究目的
To design, fabricate, and characterize a superconducting 4x4 transition-edge sensor (TES) bolometer array based on an Al/Ti bilayer for astrophysical observations.
研究成果
The fabricated superconducting 4x4 TES bolometer array based on an Al/Ti bilayer showed a transition temperature of up to 1.2 K, with smooth surface morphology and satisfactory superconducting transition properties. This makes it suitable for astrophysical observations, particularly in cosmic microwave background polarization detection.
研究不足
The study focuses on the fabrication and characterization of the TES bolometer array but does not extensively explore its performance under varying astrophysical observation conditions.
1：Experimental Design and Method Selection:
The TES bolometer array was designed with an Al/Ti bilayer on an Si3N4 substrate. The fabrication involved sputtering Al and Ti layers, lithography, and etching processes.
2：Sample Selection and Data Sources:
Four-inch silicon <100> wafers were used as substrates.
3：List of Experimental Equipment and Materials:
Equipment included a Canon mask aligner system, LAB18 sputtering system, and NICP etching system. Materials included AZ601 photoresist, HMDS, and Nb.
4：Experimental Procedures and Operational Workflow:
The process involved Piranha cleaning, LPCVD of Si3N4, HMDS coating, photoresist spin-coating, lithography, etching, and metallization.
5：Data Analysis Methods:
XRD, AFM, TEM, and resistance-temperature (R-T) characterization were used for analysis.
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