研究目的
Investigating the optical properties of p-type SnOx thin films deposited by DC reactive sputtering and their relationship with the films' phase composition and hole mobility.
研究成果
The study successfully correlated the optical properties of p-type SnOx thin films with their phase composition and hole mobility. Films with a single SnO phase exhibited higher transparency and lower refractive index, attributed to their microstructure. The increase in band gap energy was linked to the SnO phase's dominance. The findings provide insights into the optical behavior of SnOx films for potential applications in transparent electronics.
研究不足
The study is limited to SnOx films with thicknesses of 25 nm and specific OPP conditions. The optical model's accuracy depends on the assumptions made about film roughness and phase composition.
1:Experimental Design and Method Selection:
The study involved depositing 25 nm thick SnOx films by DC magnetron sputtering in reactive argon and oxygen atmosphere at different oxygen partial pressures (OPP), followed by post-annealing at 250 °C in air for 30 min. The optical properties were analyzed using UV-Vis spectroscopy.
2:Sample Selection and Data Sources:
Films were deposited at 5%, 11%, and 15% OPP. Structural, morphological, and optical characterizations were performed using XRD, SEM, AFM, XPS, and Hall effect measurements.
3:List of Experimental Equipment and Materials:
A commercial magnetron DC sputtering system (AJA international), Tin (99.999%) metallic target (Kurt J. Lesker), X-ray diffractometer (Rigaku Ultima), SEM (Zeiss Supra-40), AFM (Veeco, Model 3100 Dimension V), XPS (PHI series), and Film TekTM 3000 for optical spectroscopy.
4:999%) metallic target (Kurt J. Lesker), X-ray diffractometer (Rigaku Ultima), SEM (Zeiss Supra-40), AFM (Veeco, Model 3100 Dimension V), XPS (PHI series), and Film TekTM 3000 for optical spectroscopy.
Experimental Procedures and Operational Workflow:
4. Experimental Procedures and Operational Workflow: Films were deposited, annealed, and characterized for structural, morphological, and optical properties. Optical data analysis was performed using Film Wizard software.
5:Data Analysis Methods:
Optical constants were extracted using an optical model combining SCI equation and BEMA. The band gap was determined from absorption coefficient analysis.
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