研究目的
Investigation of physical principle of sensor response in the ITO – nanostructured titanium dioxide heterojunction for ethanol, acetone and water vapor detection.
研究成果
The study demonstrates that the charge state of electronic traps in the ITO – nano-TiO2 heterojunction significantly affects its total capacitance and sensor response. The response magnitude is frequency-dependent and varies with different analytes, suggesting potential applications in ecological monitoring despite current limitations in response and recovery times.
研究不足
The study highlights the need for resolving issues of gas selectivity and permanent stability for successful application in gas analytical devices.
1：Experimental Design and Method Selection:
Capacitance-voltage characteristics and capacitance kinetics were measured to investigate the sensor response.
2：Sample Selection and Data Sources:
Gas-sensitive samples were fabricated on glass substrates covered by ITO film with nanostructured TiO2 deposited using screen printing.
3：List of Experimental Equipment and Materials:
E7-20 immittance meter by MNIPI company, Ni target for magnetron sputter deposition, TiO2 nanopowder by PlasmaChem GmbH.
4：Experimental Procedures and Operational Workflow:
Capacitance-voltage characteristics and kinetics were measured under various frequencies and bias voltages in the presence of ethanol, acetone, and water vapor.
5：Data Analysis Methods:
Analysis of capacitance response to different analytes under varying conditions.
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