研究目的
To develop a spectroscopic measurement system based on PMTs array for studying the Argon emission spectrum from ICP plasma under RF and pulse discharge conditions.
研究成果
The developed spectroscopic measurement system based on PMTs array successfully measured the Ar emission spectrum from ICP plasma under RF and pulse discharge conditions. The intensity of the spectrum was found to increase with power and pressure but was less affected by flow and current ratio. The system demonstrated the potential for analyzing plasma parameters evolution during transient discharge processes.
研究不足
The readout period of CCD or iCCD cameras is often longer, making them unsuitable for measuring the temporal variation of the intensity directly. The system's performance is also affected by the dark signal from the surrounding environment.
1：Experimental Design and Method Selection:
A spectroscopic diagnostic system with temporal and spatial resolution was constructed using PMTs array and a spectrometer. The system was designed to solve the superposition problem between the inlet plane of bundle fiber and the focal plane of the spectrometer and to synchronize the output of PMTs.
2：Sample Selection and Data Sources:
Emissions from an ICP plasma chamber formed from Argon gas were collimated and introduced to the measurement system.
3：List of Experimental Equipment and Materials:
The system included a Czerny-Turner spectrometer (Horiba iHR550), PMTs (HAMAMATSU R928), high voltage sockets (HAMAMTSU CC238), preamplifiers (Stanford Research Systems, SR445A-350 MHz), and a multichannel scaler (MCS, ORTEC).
4：Experimental Procedures and Operational Workflow:
The light from the ICP plasma chamber was collimated and introduced to the measurement system. The inlet plane of the bundle fibers was adjusted to coincide with the focal plane of the spectrometer. The output of PMTs was synchronized and the electronic signals were amplified and analyzed.
5：Data Analysis Methods:
The intensity of Ar emission spectrum was analyzed under various process conditions to observe its variation with power, pressure, flow, and current ratio.
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