研究目的
Developing a design space for performance-enhanced strain-engineered Si nanowire field-effect-transistors by controlling the fraction of insertion of the nanowire channel into the Insulator-on-Silicon substrate and the selection of high-k gate insulators.
研究成果
The study provides a design guideline for performance-enhanced strain-engineered Si-NWFETs by controlling the fractional insertion into IOS substrates and the use of appropriate gate insulators. Devices exhibit promising performance metrics, with the nature and amount of induced stress significantly affecting carrier transport and device characteristics.
研究不足
The study is theoretical and relies on simulations; experimental validation with actual fabricated devices is not provided. The impact of stress on carrier transport is complex and may involve additional factors not considered in the model.
1:Experimental Design and Method Selection:
The study employs a self-consistent quantum-electrostatic framework incorporating stress-related effects, solved using the non-equilibrium Green’s function formalism.
2:Sample Selection and Data Sources:
Si nanowire FETs with various fractions of insertion into IOS substrates and different high-k gate insulators (La2O3, Si3N4, HfO2, TiO2) are considered.
3:List of Experimental Equipment and Materials:
The study involves theoretical modeling and simulation, with no specific experimental equipment listed.
4:Experimental Procedures and Operational Workflow:
The model is calibrated with experimental data from similar devices, then applied to study the impact of induced stress on device performance.
5:Data Analysis Methods:
The performance parameters (Ion/Ioff, VTh, gm, SS, DIBL) are analyzed as functions of induced stress for different fractional insertions and gate dielectrics.
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